Scroll dry vacuum pump.

CFD Simulation of a Dry Scroll Vacuum Pump Including Leakage Flows

One challenge for the numerical simulation of a dry scroll vacuum pump is the discretization of the chamber volume, which changes with time. In addition, the flow characteristics are very complex including the leakage flow caused by radial and axial gaps between the rotors and the housing. For engineers and designers it is imperative to understand the influence of such leakage flows on the effi...

Vacuum Gauge to Vacuum Pump Valve

A Case Study of Autoregressive Modelling and Order Selection for a Dry Vacuum Pump

Oil-free dry-vacuum pumps are prevalent in semiconductor plants worldwide today. The popularity of such pumps has grown over the years but little research has been done in the area of condition-monitoring of dry-vacuum pumps. Fault detection of one such pump through the use of AutoRegressive (AR) modelling technique and spectral analysis of vibration and acoustic data has been studied. The test...

Research on the Discharge Port of Scroll Oil Pump

The working characteristic of scroll oil pump and the propeny of medium oil are described in this paper, the leakage of oil IS analysed, and the mathemaucal model is set up for scroll o1l pump. The effects of the discharge port on the pressure of the working pocket, the oil d1splaccment and the requ1red power are obtained according to the results of calculation and e>;periment. The optimal desi...

Switchable Adhesion in Vacuum Using Bio-Inspired Dry Adhesives

Suction based attachment systems for pick and place handling of fragile objects like glass plates or optical lenses are energy-consuming and noisy and fail at reduced air pressure, which is essential, e.g., in chemical and physical vapor deposition processes. Recently, an alternative approach toward reversible adhesion of sensitive objects based on bioinspired dry adhesive structures has emerge...